CMASS004TU Helium Coriolis Mass Flowmeter
The core applications of this flow meter involve industrial and laboratory settings requiring precise control or monitoring of low-pressure helium micro-flow.
Description
CMASS004TU Helium Coriolis mass flowmeter


The core applications of this flow meter involve industrial and laboratory settings requiring precise control or monitoring of low-pressure helium micro-flow.
1. Semiconductor Manufacturing
During wafer processing, helium serves as a coolant, carrier gas, or protective gas that must be precisely introduced into process chambers. The accuracy of flow control directly impacts product yield.
2. Optical Fiber Drawing
In the fiber drawing process, helium is injected into the fiber tube to maintain pressure and ensure stable flow, requiring exceptionally precise and stable flow control.
3. Nuclear Reactor Coolant Monitoring
In certain reactor designs, helium functions as part of the cooling circuit, where monitoring micro-flow rates is critical for safety.
4. Leak Detection and Hermeticity Testing
As a gas supply for high-precision hermeticity testing, it is essential to accurately measure the helium flow rate injected into the test device.
5. Laboratory Research
In experiments involving high-pressure gas reactions, materials research, and similar applications, precise control of reactive gas injection is required.
6. Aerospace
Used in fuel cell gas supply systems or other subsystems requiring.
|
Model |
A |
B |
F |
C |
D |
d |
M |
|
CMASS003 |
210 |
325 |
95 |
156.50 |
54 |
Φ65 |
NPT1/4" Female thread |
|
CMASS004 |
210 |
325 |
95 |
156.50 |
54 |
Φ65 |
NPT1/4" Female thread |
|
CMASS008 |
210 |
325 |
95 |
156.50 |
54 |
Φ65 |
HG/T 20592 DN15 PN40 Flange |
|
CMASS015 |
210 |
348 |
95 |
180 |
54 |
Φ65 |
HG/T 20592 DN15 PN40 Flange |
Core Product Advantages
Combining the Coriolis principle with the specific characteristics of gas measurement, its advantages are particularly outstanding:
1. Direct Measurement of Gas Mass Flow
This is a decisive advantage over thermal or vortex flow meters. It directly measures the mass of gas flowing through (in g/s or kg/h), rather than volume. For highly compressible gases like helium, volume fluctuates significantly with temperature and pressure changes. Mass flow remains constant, and direct measurement eliminates the need for complex temperature and pressure compensation, fundamentally removing sources of error and ensuring accurate and reliable results.
2. High-Pressure Adaptability
A operating pressure of 3.0 MPa is essential for many industrial gas applications. The flow meter is designed to meet this pressure rating and can be installed directly into pipelines.
4. High Accuracy and Repeatability
With an accuracy of 0.5%, it achieves an exceptionally high level of performance in gas measurement, particularly for micro-flow applications, providing highly reliable data for process control.
5. Safety-Oriented Design
Explosion-proof certification ensures safe operation in hazardous environments where flammable or explosive gases may be present. The IP67 protection rating enables resistance to dust and water jets, making it suitable for harsh industrial conditions.
Model and diameter
|
Model |
Nominal diameter |
Medium temp. |
Max.W.P |
Max. flow-rate |
||
|
inch |
mm |
kg/min |
Lb/min |
|||
|
CMASS003 |
1/8" |
DN03 |
-50℃~+150℃ |
≤10MPa |
3 |
6.61 |
|
CMASS004 |
1/6" |
DN04 |
-50℃~+150℃ |
≤10MPa |
5 |
11 |
|
CMASS008 |
1/4" |
DN08 |
-50℃~+150℃ |
≤10MPa |
20 |
44 |
|
CMASS015 |
1/2" |
DN15 |
-50℃~+150℃ |
≤10MPa |
60 |
132 |
|
Characteristic |
Description |
|
Certification: Transmitter & Sensor Assembly |
CCS Certification, CPA, Explosion proof certificate(ex) |
|
Power Supply |
220VAC/24VDC Self-adaption |
|
Output signal |
Hart,4 to 20mA current loop active,Modbus RTU/RS-485, Pulse active |
|
Display;Operate |
3-line backlight; Touch key control |
|
Protection grade |
IP66,IP67 |
|
Housing material |
304 stainless steel, ZL401 (Transmitter) |
|
Electrical connection |
1/2 NPT,M20*1.5 |
|
Measuring Tube Material;Wetted Parts Surface Finish |
316L (default), titanium/Ha C alloy/tantalum (optional); polishable. |
|
Process connection |
Thread,Flange,Sanitary high-speed interface |
|
Accuracy |
±0.1%,±0.15%, ±0.2%, ±0.5 %, ±1.0% |
|
Transmitter software |
CLS100 (default), optional CLS200, CLS300 |
|
>Operating language display |
Chinese, English, Russian |
|
>>Other certifications |
Explosion proof certificate, SIL, CCS, 3-A, EAC |
Core value to be conveyed to users
- Precision Measurement:Direct mass flow measurement eliminates gas temperature/pressure compensation challenges, ensuring high accuracy.
- High Reliability:Designed for low-pressure environments with no moving parts, minimizing maintenance requirements.
- Safety Compliance:Explosion-proof and ingress protection certifications meet stringent safety standards.
- Smart Integration:Multiple output options enable seamless integration into automated control systems.



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